ASTM and Standards for Surface Analysis

ASTM International is an open forum for the development of high quality, market relevant international standards used around the globe.

ASTM Committee E42 on Surface Analysis was formed in 1976. E42 meets once a year, usually in October on the Sunday prior to the annual AVS/ASSD meeting on Surface Analysis or the International AVS Symposium.

Each main committee in ASTM International is composed of subcommittees that address specific segments within the general subject area covered by the technical committee.

E42.02 Terminology
E42.03 Auger Electron Spectroscopy and X-Ray Photoelectron Spectroscopy
E42.06 SIMS
E42.08 Ion Beam Sputtering
E42.13 Vacuum Technology
E42.14 STM/AFM
E42.15 Electron Probe Microanalysis/Electron Microscopy
E42.90 Executive

E42.91 Awards
E42.92 US TAG ISO/TC 201
E42.94 US TAG ISO/TC 112
E42.96 US TAG ISO/TC 202

There's more on the ASTM web site, here:

ASTM International

Active standards under the jurisdiction of E42

E673-03 Standard Terminology Relating to Surface Analysis
E684-04 Standard Practice for Approximate Determination of Current Density of Large-Diameter Ion Beams for Sputter Depth Profiling of Solid Surfaces
E827-08 Standard Practice for Identifying Elements by the Peaks in Auger Electron Spectroscopy
E902-05 Standard Practice for Checking the Operating Characteristics of X-Ray Photoelectron Spectrometers
E983-05 Standard Guide for Minimizing Unwanted Electron Beam Effects in Auger Electron Spectroscopy
E984-06 Standard Guide for Identifying Chemical Effects and Matrix Effects in Auger Electron Spectroscopy
E995-04 Standard Guide for Background Subtraction Techniques in Auger Electron Spectroscopy and X-ray Photoelectron Spectroscopy
E996-04 Standard Practice for Reporting Data in Auger Electron Spectroscopy and X-ray Photoelectron Spectroscopy
E1016-07 Standard Guide for Literature Describing Properties of Electrostatic Electron Spectrometers
E1078-09 Standard Guide for Specimen Preparation and Mounting in Surface Analysis
E1127-08 Standard Guide for Depth Profiling in Auger Electron Spectroscopy
E1162-06 Standard Practice for Reporting Sputter Depth Profile Data in Secondary Ion Mass Spectrometry (SIMS)
E1217-05 Standard Practice for Determination of the Specimen Area Contributing to the Detected Signal in Auger Electron Spectrometers and Some X-Ray Photoelectron Spectrometers
E1438-06 Standard Guide for Measuring Widths of Interfaces in Sputter Depth Profiling Using SIMS
E1504-06 Standard Practice for Reporting Mass Spectral Data in Secondary Ion Mass Spectrometry (SIMS)
E1523-09 Standard Guide to Charge Control and Charge Referencing Techniques in X-Ray Photoelectron Spectroscopy
E1577-04 Standard Guide for Reporting of Ion Beam Parameters Used in Surface Analysis
E1634-02(2007) Standard Guide for Performing Sputter Crater Depth Measurements
E1635-06 Standard Practice for Reporting Imaging Data in Secondary Ion Mass Spectrometry (SIMS)
E1636-04 Standard Practice for Analytically Describing Sputter-Depth-Profile Interface Data by an Extended Logistic Function
E1813-96(2007) Standard Practice for Measuring and Reporting Probe Tip Shape in Scanning Probe Microscopy
E1829-09 Standard Guide for Handling Specimens Prior to Surface Analysis
E1880-06 Standard Practice for Tissue Cryosection Analysis with SIMS
E1881-06 Standard Guide for Cell Culture Analysis with SIMS
E2108-05 Standard Practice for Calibration of the Electron Binding-Energy Scale of an X-Ray Photoelectron Spectrometer
E2382-04 Guide to Scanner and Tip Related Artifacts in Scanning Tunneling Microscopy and Atomic Force Microscopy
E2426-05 Standard Practice for Pulse Counting System Dead Time Determination by Measuring Isotopic Ratios with SIMS
E2530-06 Standard Practice for Calibrating the Z-Magnification of an Atomic Force Microscope at Subnanometer Displacement Levels Using Si(111) Monatomic Steps
E2695-09 Standard Guide for Interpretation of Mass Spectral Data Acquired with Time-of-Flight Secondary Ion Mass Spectroscopy

Proposed new standards under the jurisdiction of E42

WK13221 Standard Guide to:Analysis Protocol for Thin Corrosion Layers using
Surface Analysis Techniques (Technical Contact: Donald Baer)

WK19049 Consistence and Reproducibility of Sputter Rate Measurements
(Technical Contact: Mark Engelhard)

WK21206 Dimensions of Knife-Edge Flanges (Technical Contact: Stuart Tison)

WK23393 Standard Guide for Selection of Calibrations Needed for X-ray
Photoelectron Spectroscopy (XPS) Experiments (Technical Contact: Susan
Kerber)