Details of AXIS Ultra DLD components and performance.

VACUUM SYSTEM
Sample analysis chamber (SAC)
Stainless steel with double Mu metal screening layer
Spherical 267mm diameter, 23 ports (15 line of sight)
Ion pump with cryoshroud (220 l/s)
Sample treatment chamber (STC)
Multiple options offering high flexibility including:
Simple load lock and preparation chamber
Preparation chamber with additional fast entry lock
Catalyst reaction chamber
Radial distribution chamber
Turbomolecular pump (250 l/s) (oil free option)

X-RAY SOURCES
Dual anode (Mg and Al Kα source)
High power Al monochromator
500mm Rowland circle
Quartz toroidal backplane

ELECTRON ENERGY ANALYSER
180° hemispherical analyser
165mm mean radius
Spherical mirror analyser

SMALL SPOT SELECTED AREA
defined by insertion of aperture into lens column
110um, 55um, 27um and 15um calibrated analysis areas
virtual probe deflected over sample by scan plates (sample remains static)

PHOTOELECTRON DETECTOR
MCP stack and delay-line detector
Scanned and snapshot spectroscopy modes
2D imaging mode

CHARGE NEUTRALISATION
Fully automatic
Coaxial low energy electron source

AUTOMATION
4 axis software and hardware controlled autostage
5 axis software and hardware controlled autostage (optional)
Optional fully automatic spot size selection from 15µm to large area

MULTITECHNIQUE CAPABILITY
SAM: Scanning Auger Microscopy Schottky Field Emission Source
ISS: Ion Scattering Spectroscopy
SIMS: Secondary Ion Mass Spectrometry (Quadrupole)
UPS: Ultraviolet Photoelectron Spectroscopy

Kratos Analytical Ltd has a policy of continuous product improvement and therefore reserves the right to make alterations to specifications without notice.  Whilst Kratos Analytical Ltd believes this documentation to be true and accurate, Kratos Analytical cannot be held responsible for any errors and omissions contained herein.