QUANTITATIVE PARALLEL IMAGING
The unique combination of the spherical mirror analyser and pulse counting DLD provides the ability to generate chemical images of the surface expressed in relative atomic concentration. Fast parallel imaging means that a set of quantitative images can be acquired in only a few minutes. The image below is from a patterned SiO₂ / Si sample with a photoresist material still present in the centre circle. Images were acquired in less than 16 minutes corresponding to oxygen, silicon oxide and elemental silicon peak positions. Subsequent data processing produces the relative atomic concentration image which can then be used to define the elemental and chemical composition as a function of position. Also shown is a line scan generated from a 2 pixel (3µm) wide line drawn across the image. Similarly, a quantification report can be generated from a group of pixels to give small spot information from areas only several microns square.

ASK A QUESTION ABOUT THIS PRODUCT