The AXIS Ultra DLD integrates the Kratos patented magnetic immersion lens and charge neutralisation system with the spherical mirror and concentric hemispherical analysers. Combined with the newly developed delay-line detector (DLD) for both imaging and spectroscopy the AXIS Ultra DLD is the very best spectrometer for analysts requiring unsurpassed performance.

The hemispherical analyser provides both high energy resolution and high sensitivity spectroscopic performance. Exceptional small spot capabilities (<15µm) are achieved via a series of selected area apertures used in combination with the magnetic and electrostatic lenses. In parallel imaging mode photoelectrons are transferred to the patented spherical mirror analyser to produce real time chemical state images with less than 3µm spatial resolution.

The delay-line detector, comprising a multi-channel plate stack above a delay-line anode, is used for photoelectron detection in both spectroscopy and imaging modes.  With over 100 detector channels the DLD can also be used to acquire unscanned or ‘snapshot’ small spot spectra in a matter of seconds. Genuine pulse counting in 2D imaging mode means that quantitative parallel images can now be generated allowing greater insight into the lateral distribution of chemical species at the surface.

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QUANTITATIVE PARALLEL IMAGING
The unique combination of the spherical mirror analyser and pulse counting DLD provides the ability to generate chemical images of the surface expressed in relative atomic concentration. Fast parallel imaging means that a set of quantitative images can be acquired in only a few minutes. The image below is from a patterned SiO₂ / Si sample with a photoresist material still present in the centre circle. Images were acquired in less than 16 minutes corresponding to oxygen, silicon oxide and elemental silicon peak positions. Subsequent data processing produces the relative atomic concentration image which can then be used to define the elemental and chemical composition as a function of position. Also shown is a line scan generated from a 2 pixel (3µm) wide line drawn across the image. Similarly, a quantification report can be generated from a group of pixels to give small spot information from areas only several microns square.

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SNAPSHOT SPECTROSCOPY
The delay line detector provides >100 energy channels and can be used to acquire spectra in either scanned or snapshot (unscanned) modes. In traditional scanned mode the energy of the input lens and analyser is scanned so that every DLD channel detects photoelectrons corresponding to each energy step of the scan. In snapshot mode, the input lens is used to define the photoelectron energy detected. Due to the energy dispersion of photoelectrons traversing the hemispherical analyser, a spectrum can be acquired using the energy channels of the DLD without scanning the input lens or analyser. The result is a spectrum acquired within seconds. This is demonstrated in the figure below, which shows a C1s snapshot spectrum acquired from a 15µm area of clean PET. The fast spectral acquisition of snapshot mode also improves the data acquisition efficiency during sputter depth profiling. Spectra are acquired for each elemental region in seconds without scanning the analyser during acquisition. This greatly reduces the cycle time leading in turn to faster depth profiling capability. An example of snapshot spectra acquired during a depth profile through an inorganic/organic multilayer is also shown.

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CHARGE NEUTRALISATION
The patented AXIS charge neutralisation system provides charge compensation on all types of insulating materials which is particularly important when using a monochromatic x-ray source. Charge neutralisation is achieved by low energy electrons therefore causing no damage to the surface of the sample. Simple ‘on for acquisition’ type operation means that no optimisation of neutraliser operating parameters is required when changing samples so that acquisition from insulating samples may be automated and data acquired unattended. The example shows an optical image of a bundle of cellulose fibres in the analysis position of the Ultra DLD together with a high energy resolution C1s spectrum. Excellent charge neutralisation of a traditionally challenging topographic sample is demonstrated by the energy resolution and FWHM of the various components under the carbon envelope.

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