XPS IMAGING AND MULTI-POINT SPECTROSCOPY
XPS images can be acquired quickly and accurately by scanning the microprobe using a set of octopole scan plates. The optional, external zoom microscope is focused in the same plane as the photoelectron spectrometer to allow rapid sample alignment and capture of high quality optical images of the sample. The XPS image can be used by the analyst to select multi-point small spot analyses from anywhere in the imaging field of view, providing detailed high resolution spectra from the selected area without moving the sample. In this example a high quality optical image was obtained for sample pre-alignment purposes, the XPS map shows distribution of Al backside interconnects on Si-O-N device. Small spot spectroscopy can then be obtained from individual pads without sample translation.

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