Multi-technique X-ray Photoelectron Spectroscopy with XPS-mapping capability

The AXIS Ultra HSA is the latest generation spectrometer for high sensitivity multi-technique photoelectron spectroscopy. Using the 165mm radius hemispherical analyser (HSA) spectra may be acquired in either scanned or rapid un-scanned ‘snapshot’ mode using the delay-line detector (DLD).

The AXIS Ultra HSA is capable of surface mapping to provide lateral distribution maps of elemental and chemical species at the surface. As with all AXIS spectrometers unrivalled performance on insulators is guaranteed by the use of the coaxial charge neutalisation system. The neutraliser ensures uniform charge compensation even at high take-off angles and for rough or inhomogeneous samples.

With a compact footprint the AXIS Ultra HSA is suitable for use in research or production environments. Advanced electronic control units provide total software control of all functions of the spectrometer including the vacuum system, data acquisition and any additional techniques.

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HIGH SENSITIVITY
The high sensitivity of the Ultra HSA means that not only can spectroscopy be achieved in much shorter analysis times leading to faster sample throughput but also detection limits are improved. Meaningful chemical state and quantitative information can be achieved from samples with elemental concentrations < 0.1Wt%. In this example the survey spectra from an Al-Zn-In sacrificial marine anode shows very low concentration of In, higher resolution spectra reveal the oxidation state and the amount of In present at the surface (0.02Wt% ).

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XPS IMAGING AND MULTI-POINT SPECTROSCOPY
XPS images can be acquired quickly and accurately by scanning the microprobe using a set of octopole scan plates. The optional, external zoom microscope is focused in the same plane as the photoelectron spectrometer to allow rapid sample alignment and capture of high quality optical images of the sample. The XPS image can be used by the analyst to select multi-point small spot analyses from anywhere in the imaging field of view, providing detailed high resolution spectra from the selected area without moving the sample. In this example a high quality optical image was obtained for sample pre-alignment purposes, the XPS map shows distribution of Al backside interconnects on Si-O-N device. Small spot spectroscopy can then be obtained from individual pads without sample translation.

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HIGH RESOLUTION ARXPS
Angle resolved XPS is an important tool for non-destructive near surface and ultra thin film analysis. The Ultra HSA provides the highest energy resolution at all take off angles as well as detecting very low concentrations of near surface species. Automated eucentric positioning of the sample ensures that the analysis position remains constant as the sample is tilted. Automatic charge neutralization allows all types of sample to be analysed by ARXPS automatically. The Si 2p spectra show an analysis of a thin SiO₂ layer at bulk and surface sensitive angles. Excellent energy resolution is maintained in both cases as evidenced by core level splitting in the Si 2p elemental peaks.

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Axis Ultra published papers - references provided by "Google Scholar"

Axis Ultra published references from Google Scholar

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