HIGH RESOLUTION ARXPS
Angle resolved XPS is an important tool for non-destructive near surface and ultra thin film analysis. The Ultra HSA provides the highest energy resolution at all take off angles as well as detecting very low concentrations of near surface species. Automated eucentric positioning of the sample ensures that the analysis position remains constant as the sample is tilted. Automatic charge neutralization allows all types of sample to be analysed by ARXPS automatically. The Si 2p spectra show an analysis of a thin SiO₂ layer at bulk and surface sensitive angles. Excellent energy resolution is maintained in both cases as evidenced by core level splitting in the Si 2p elemental peaks.

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