AXIS Ultra HSA system components and performance

VACUUM SYSTEM
Fully interlocked vacuum control
Software control of valves, gauges & pumps
Sample analysis chamber (SAC)
Stainless steel with double Mu metal screening layer
Spherical 267mm diameter, 23 ports (15 line of sight)
Ion pump with cryoshroud (220 l/s)
Sample treatment chamber (STC)
Multiple options offering high flexibility including:
Simple load lock and preparation chamber
Preparation chamber with additional fast entry lock
Catalyst reaction chamber
Radial distribution chamber (option)
Turbomolecular pump (250 l/s) (oil free option)

X-RAY SOURCES
Mg/Al achromatic source moveable retractor for optimisation
500mm Rowland circle Al monochromator
Quartz toroidal backplane
450W max power 15kV 30mA

ELECTRON ENERGY ANALYSER
180° hemispherical analyser
165mm mean radius

SMALL SPOT SELECTED AREA
defined by insertion of aperture into lens column
110µm, 55µm, 27µm and 15µm calibrated analysis areas
virtual probe deflected over sample by scan plates (sample remains static)

PHOTOELECTRON DETECTOR
MCP stack & delay-line detector
Scanned & snapshot spectroscopy modes

CHARGE NEUTRALISATION
Fully automatic coaxial low energy electron source

AUTOMATION OPTIONS
4 axis software & hardware controlled autostage
5 axis software & hardware controlled autostage (optional)
Spot size selection from 15µm to large area

MULTI-TECHNIQUE CAPABILITY
SAM: Scanning Auger Microscopy
Schottky Field Emission Electron Source
ISS: Ion Scattering Spectroscopy
SIMS: Secondary Ion Mass Spectrometry (Quadrupole)
UPS: Ultraviolet Photoelectron Spectroscopy

Kratos Analytical Ltd has a policy of continuous product improvement and therefore reserves the right to make alterations to specifications without notice.  Whilst Kratos Analytical Ltd believes this documentation to be true and accurate, Kratos Analytical cannot be held responsible for any errors and omissions contained herein.