ION SOURCE
The Ar⁺ ion gun of the AXIS Nova operates with continuously variable beam energies between 4kV and 50V. The precision ion column incorporates a bend for neutral suppression as well as the ability to operate in floating mode producing high current densities at low ion energies for improved interface resolution and fast etch rates even at low ion acceleration voltage. All control and status read-backs are displayed in the Vision acquisition software with pre-defined operating conditions provided in a look-up table. As expected for the level of automation of the AXIS Nova, the argon gas supply for the ion source can be turned on and off as required during unattended operation.

X-RAY SOURCE
The X-ray source on the AXIS Nova is based on a large 500mm Rowland circle geometry ensuring less energy dispersion in the focused X-ray spot than systems based on smaller Rowland circles. This guarantees the highest energy resolution as demonstrated by a FWHM <0.48eV for Ag 3d. The Al Kα X-rays are monochromated by a single toroidal backplane for ease of alignment of the X-ray spot with the analysis position. The X-ray anode is engineered to allow indexed movement of the anode surface with respect to the cathode. Thus new anode surface may be exposed as required without breaking vacuum. The availability of 10 anode positions significantly increases the useful lifetime of the anode.

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